Воздействие плазмы N-=SUB=-2-=/SUB=- на монослои дисульфида молибдена

نویسندگان

چکیده

Based on ab initio DFT simulation results, the main processes of interaction thermal N atoms with MoS2 monolayers are revealed, potential mechanisms defect formation by low-energy ions N2+ described, and ion threshold energy required to sulfur removal is estimated.

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ژورنال

عنوان ژورنال: Pis?ma v Žurnal tehni?eskoj fiziki

سال: 2023

ISSN: ['1726-7471', '0320-0116']

DOI: https://doi.org/10.21883/pjtf.2023.18.56169.19640